POLY(METHYL ALPHA-TRIFLUOROMETHYLACRYLATE) AS A POSITIVE ELECTRON-BEAM RESIST

被引：18

作者：

WILLSON, CG

ITO, H

MILLER, DC

TESSIER, TG

机构：

来源：

POLYMER ENGINEERING AND SCIENCE | 1983年 / 23卷 / 18期

关键词：

D O I：

10.1002/pen.760231805

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：1000 / 1003

页数：4

共 22 条

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[10] POLYMERIZATION OF METHYL ALPHA-(TRIFLUOROMETHYL)ACRYLATE AND ALPHA-(TRIFLUOROMETHYL)ACRYLONITRILE AND COPOLYMERIZATION OF THESE MONOMERS WITH METHYL-METHACRYLATE [J].

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MACROMOLECULES, 1982, 15 (03) :915-920

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