COMPLETE CHARACTERIZATION OF THIN-FILM AND THICK-FILM MATERIALS USING WIDEBAND REFLECTION ACOUSTIC MICROSCOPY

被引:25
作者
LEE, CC
TSAI, CS
CHENG, X
机构
来源
IEEE TRANSACTIONS ON SONICS AND ULTRASONICS | 1985年 / 32卷 / 02期
关键词
D O I
10.1109/T-SU.1985.31591
中图分类号
O42 [声学];
学科分类号
070206 ; 082403 ;
摘要
引用
收藏
页码:248 / 258
页数:11
相关论文
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