PROTECTING LAYER FOR DIELECTRIC IN AC PLASMA PANELS

被引:117
作者
URADE, T
IEMORI, T
OSAWA, M
NAKAYAMA, N
MORITA, I
机构
[1] FUJITSU LABS LTD,ELECTRON TUBE DIV,DEV DEPT,PLASMA DISPLAY PANEL SECT,AKASHI 674,HYOGO,JAPAN
[2] FUJITSU LABS LTD,ADM DEPT,AKASHI 674,HYOGO,JAPAN
关键词
D O I
10.1109/T-ED.1976.18397
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:313 / 318
页数:6
相关论文
共 7 条
[1]   ANALYSIS OF LOW-ENERGY SPUTTERING [J].
LANGBERG, E .
PHYSICAL REVIEW, 1958, 111 (01) :91-97
[2]  
Meek J. M., 1953, ELECTRICAL BREAKDOWN, P80
[3]  
NAKAYAMA N, 1970, MAY IDEA S SOC INF D
[4]   SPUTTERING YIELDS AT VERY LOW BOMBARDING ION ENERGIES [J].
STUART, RV ;
WEHNER, GK .
JOURNAL OF APPLIED PHYSICS, 1962, 33 (07) :2345-&
[5]  
UCHIIKE H, 1973, INT ELECTRON DEVICE, P191
[6]  
1966, CHEMICAL TABLES, P819
[7]  
1969, HDB DISCHARGE, P38