SPUTTERING YIELDS AT VERY LOW BOMBARDING ION ENERGIES

被引：245

作者：

STUART, RV

WEHNER, GK

机构：

来源：

关键词：

D O I：

10.1063/1.1728959

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2345 / &

共 26 条

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[8]

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LAEGREID, N ;

WEHNER, GK .