STRUCTURE MODELING OF DLC-FILMS FORMED BY PULSED-ARC METHOD

被引：8

作者：

TOCHITSKY, EI

STANISHEVSKY, AV

机构：

[1] Plasmoteg Engineering Center, the Belarus Academy of Sciences, Minsk, 220141

来源：

CERAMICS INTERNATIONAL | 1995年 / 21卷 / 06期

关键词：

D O I：

10.1016/0272-8842(95)94465-M

中图分类号：

TQ174 [陶瓷工业]; TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Reported here is the continuation of the structure characterization of carbon thin films produced by a pulsed vacuum are plasma source. Hydrogen free carbon films with thickness up to 3 mu m were prepared with average deposition rate of 5 mu m/h onto various substrates. It was found that these carbon films are not quite amorphous and can be described by modelling the clustered structure with different sp(3)/sp(2)/sp bond ratios depending on deposition conditions. Results of the experimental investigations and numerical modelling of the films structure are presented.

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页码：399 / 401

页数：3

相关论文

共 10 条

[1] MODELING STUDIES OF AMORPHOUS-CARBON [J].

BEEMAN, D ;

SILVERMAN, J ;

LYNDS, R ;

ANDERSON, MR .

PHYSICAL REVIEW B, 1984, 30 (02) :870-875

[2] LASER PLASMA SOURCE OF AMORPHIC DIAMOND [J].

COLLINS, CB ;

DAVANLOO, F ;

JUENGERMAN, EM ;

OSBORN, WR ;

JANDER, DR .

APPLIED PHYSICS LETTERS, 1989, 54 (03) :216-218

[3] TEXTURED STRUCTURE OF DIAMOND-LIKE CARBON PREPARED WITHOUT HYDROGEN [J].

COLLINS, CB ;

DAVANLOO, F ;

JUENGERMAN, EM ;

JANDER, DR ;

LEE, TJ .

SURFACE & COATINGS TECHNOLOGY, 1991, 47 (1-3) :754-760

[4] SPUTTER DEPOSITION OF DENSE DIAMOND-LIKE CARBON-FILMS AT LOW-TEMPERATURE [J].

CUOMO, JJ ;

DOYLE, JP ;

BRULEY, J ;

LIU, JC .

APPLIED PHYSICS LETTERS, 1991, 58 (05) :466-468

[5]

KHVOSTOV VV, 1985, FIZ TVERD TELA+, V27, P887

[6] DIAMOND-LIKE CARBON COATINGS BY ARC-DISCHARGE METHODS [J].

KOSKINEN, J ;

ANTTILA, A ;

HIRVONEN, JP .

SURFACE & COATINGS TECHNOLOGY, 1991, 47 (1-3) :180-187

[7] LASER-ARC - A NEW METHOD FOR PREPARATION OF DIAMOND-LIKE CARBON-FILMS [J].

SCHEIBE, HJ ;

SIEMROTH, P ;

POMPE, W ;

SCHOENEICH, B .

SURFACE & COATINGS TECHNOLOGY, 1991, 47 (1-3) :455-464

[8] GRAPHITIC NETWORK MODELS OF DIAMONDLIKE CARBON [J].

TAMOR, MA ;

WU, CH .

JOURNAL OF APPLIED PHYSICS, 1990, 67 (02) :1007-1012

[9] ELECTRICAL EROSION PULSED PLASMA ACCELERATORS FOR PREPARING DIAMOND-LIKE CARBON COATINGS [J].

TOCHITSKY, EI ;

SELIFANOV, OV ;

AKULICH, VV ;

KAPUSTIN, IA ;

STANISHEVSKII, AV .

SURFACE & COATINGS TECHNOLOGY, 1991, 47 (1-3) :522-527

[10] STRUCTURE AND PROPERTIES OF CARBON-FILMS PREPARED BY PULSED VACUUM-ARC DEPOSITION [J].

TOCHITSKY, EI ;

STANISHEVSKII, AV ;

KAPUSTIN, IA ;

AKULICH, VV ;

SELIFANOV, OV .

SURFACE & COATINGS TECHNOLOGY, 1991, 47 (1-3) :292-298