共 5 条
[1]
ALVAREZ AR, 1987 P INT S VLSI TE
[2]
CHIU TY, 1987, IEDM, P24
[3]
GERODOLLE A, 1988, ESSDERC 88
[4]
MURARKA SP, 1987, J VAC SCI TECHNOL B, V5, P1675