ANALYSIS OF POLYSILICON DIFFUSION SOURCES

被引：40

作者：

PROBST, V

BOHM, HJ

SCHABER, H

OPPOLZER, H

WEITZEL, I

机构：

来源：

JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1988年 / 135卷 / 03期

关键词：

D O I：

10.1149/1.2095706

中图分类号：

O646 [电化学、电解、磁化学];

学科分类号：

081704 ;

摘要：

引用

页码：671 / 676

页数：6

共 21 条

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