ELECTRON FOCUSING WITH MULTIPARALLEL GAAS-ALGAAS WIRES DEFINED BY DAMAGELESS PROCESSING

被引:22
作者
NIHEY, F
NAKAMURA, K
KUZUHARA, M
SAMOTO, N
ITOH, T
机构
[1] Microelectronics Research Laboratories, NEC Corporation, Miyamae-ku, Kawasaki, Kanagawa 213
关键词
D O I
10.1063/1.103489
中图分类号
O59 [应用物理学];
学科分类号
摘要
Magnetoresistance modulation, resulting from electron focusing, is investigated with multiparallel GaAs-AlGaAs wires, which are defined by electron beam lithography and damageless wet-chemical etching. Distinct focusing peaks in magnetoresistance are observed, although the samples have wires longer than a ballistic mean free path, which is derived from the focusing peak intensity. Specularity coefficient p for the etched region boundary is also obtained as p≊1 from the focusing peak ratio. The mechanism limiting ballistic transport in the electron focusing condition is discussed, based on the temperature and the electron density dependence of the peak intensity.
引用
收藏
页码:1218 / 1220
页数:3
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