SPUTTERING OF ADSORBED LAYERS BY ION-BOMBARDMENT

被引：54

作者：

TAGLAUER, E ^{[1
]}

BEITAT, U ^{[1
]}

MARIN, G ^{[1
]}

HEILAND, W ^{[1
]}

机构：

[1] MAX PLANCK INST PLASMA PHYS,EURATOM ASSOC,D-8046 GARCHING,FED REP GER

来源：

关键词：

D O I：

10.1016/0022-3115(76)90325-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：193 / 198

页数：6

共 20 条

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