QUALITY OF VACUUM-DEPOSITED FILMS

被引:14
作者
VINCETT, PS
BARLOW, WA
ROBERTS, GG
机构
[1] ICI,CORP LAB,RUNCORN,CHESHIRE,ENGLAND
[2] NEW UNIV ULSTER,COLERAINE,NORTH IRELAND
关键词
D O I
10.1038/255542a0
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
引用
收藏
页码:542 / 544
页数:3
相关论文
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