共 12 条
[1]
Butler, 1966, 6TH P INT C EL MICR, V1, P191
[2]
Glaser W., 1952, GRUNDLAGEN ELEKTRONE
[3]
SOME USES OF COMPUTERS IN ELECTRON OPTICS
[J].
JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS,
1981, 14 (12)
:1353-1367
[5]
PLASS GN, 1942, J APPL PHYS, V13, P582
[6]
The weak electrical single lens lowest spherical aberration
[J].
ZEITSCHRIFT FUR PHYSIK,
1936, 101 (01)
:23-26
[7]
IMPROVEMENT OF ELECTROSTATIC LENSES FOR ION-BEAM LITHOGRAPHY
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1983, 1 (04)
:1137-1140
[8]
SZILAGYI M, 1977, OPTIK, V48, P215
[10]
SZILAGYI M, 1980, 7TH EL MICR P EUR C, V1, P62