THEORETICAL CONSIDERATIONS ON SENSITIVITIES OF ELECTRON-BEAM RESISTS

被引：12

作者：

TSUDA, M ^{[1
]}

OIKAWA, S ^{[1
]}

SUZUKI, A ^{[1
]}

机构：

[1] CHIBA UNIV,FAC PHARMACEUT SCI,PHYS CHEM LAB,CHIBA 280,JAPAN

来源：

POLYMER ENGINEERING AND SCIENCE | 1977年 / 17卷 / 06期

关键词：

D O I：

10.1002/pen.760170612

中图分类号：

TQ [化学工业];

学科分类号：

0817 ;

摘要：

引用

页码：390 / 395

页数：6

共 18 条

[1]

BODER N, 1970, J AM CHEM SOC, V92, P3854

[2]

BREWER TL, 1973, PHOTOPOLYMERS PRINCI, P138

[3]

CHAPIRO A, 1962, RADIATION CHEMISTRY

[4]

CHARLESBY A, 1960, ATOMIC RADIATION POL

[5]

DOEING JP, 1969, J CHEM PHYS, V51, P2866

[6]

FUEKI L, 1966, RADIATIONS ATOMS MOL, P103

[7]

GIPSTEIN E, 1975, 170TH NATL M AM CHEM

[8] HIGH-SPEED LOW-POWER X-RAY LITHOGRAPHY [J].

LENZO, PV ;

SPENCER, EG .

APPLIED PHYSICS LETTERS, 1974, 24 (06) :289-291

[9] EFFECT OF CHEMICAL STRUCTURE OF VINYL POLYMERS ON CROSSLINKING AND DEGRADATION BY IONIZING RADIATION [J].

MILLER, AA ;

LAWTON, EJ ;

BALWIT, JS .

JOURNAL OF POLYMER SCIENCE, 1954, 14 (77) :503-504

[10] APPROXIMATE SELF-CONSISTENT MOLECULAR-ORBITAL THEORY .5. INTERMEDIATE NEGLECT OF DIFFERENTIAL OVERLAP [J].

POPLE, JA ;

BEVERIDGE, DL ;

DOBOSH, PA .

JOURNAL OF CHEMICAL PHYSICS, 1967, 47 (06) :2026-+

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