INFRARED-ABSORPTION OF IR AND IRSI THIN-FILMS ON SI SUBSTRATES

被引：9

作者：

CHEN, CK

TSAUR, BY

FINN, MC

机构：

来源：

APPLIED PHYSICS LETTERS | 1989年 / 54卷 / 04期

关键词：

D O I：

10.1063/1.100995

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：310 / 312

页数：3

共 18 条

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[2]

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[3]

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[4]

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[6]

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[7] INFRARED-ABSORPTION OF THIN METAL-FILMS - PT ON SI [J].

MAHAN, GD ;

MARPLE, DTF .

APPLIED PHYSICS LETTERS, 1983, 42 (03) :219-221

[8]

MOONEY JM, 1986, THESIS U ARIZONA, pCH4

[9]

Pellegrini P. W., 1982, International Electron Devices Meeting. Technical Digest, P157

[10] FORMATION OF IRIDIUM SILICIDES FROM IR THIN-FILMS ON SI SUBSTRATES [J].

PETERSSON, S ;

BAGLIN, J ;

HAMMER, W ;

DHEURLE, F ;

KUAN, TS ;

OHDOMARI, I ;

SOUSAPIRES, JD ;

TOVE, P .

JOURNAL OF APPLIED PHYSICS, 1979, 50 (05) :3357-3365

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