ELECTRON-IMPACT CROSS-SECTION DATA FOR CARBON TETRAFLUORIDE

被引：116

作者：

BONHAM, RA

机构：

[1] Department of Chemistry, Indiana University, Bloomington, IN

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1994年 / 33卷 / 7B期

关键词：

ELECTRON IMPACT; CROSS SECTIONS; CARBON TETRAFLUORIDE;

D O I：

10.1143/JJAP.33.4157

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Recent electron impact cross section data on CF4 are critically reviewed and a cross-section data set suitable for plasma modeling purposes is suggested.

引用

页码：4157 / 4164

页数：8

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