ON IMPURITY DIFFUSION IN ION-BEAM-MIXED AMORPHOUS FILMS

被引:18
作者
BOTTIGER, J [1 ]
MIKKELSEN, NJ [1 ]
NIELSEN, SK [1 ]
PAMPUS, K [1 ]
机构
[1] UNIV GOTTINGEN,INST ZWEITES PHYS,D-3400 GOTTINGEN,FED REP GER
关键词
D O I
10.1016/0022-3093(86)90054-2
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:35 / 41
页数:7
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