STRESSES IN EVAPORATED SILICON MONOXIDE FILMS

被引：21

作者：

NOVICE, MA

机构：

来源：

关键词：

D O I：

10.1016/0042-207X(64)90475-0

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：385 / &

共 19 条

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[2]

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[3]

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[4]

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SMITH, SD .

[7] ANNEALING SILICON MONOXIDE FILMS ON ALUMINIUM MIRRORS [J].

HOLLAND, L ;

PUTNER, T ;

BALL, R .

BRITISH JOURNAL OF APPLIED PHYSICS, 1960, 11 (04) :167-168

[8]

HOLLAND L, 1961, BRIT J APPL PHYS, V12, P581

[9] THE GROWTH AND STRUCTURE OF THIN METALLIC FILMS [J].

LEVINSTEIN, H .

NOVICE, MA .

BRITISH JOURNAL OF APPLIED PHYSICS, 1962, 13 (11) :561-&