HYDROGENATION OF SIC - THEORY AND EXPERIMENTS

被引：6

作者：

FISCHMAN, GS

BROWN, SD

ZANGVIL, A

机构：

[1] UNIV ILLINOIS,DEPT MET & MIN ENGN,URBANA,IL 61801

[2] UNIV ILLINOIS,MAT RES LAB,URBANA,IL 61801

来源：

MATERIALS SCIENCE AND ENGINEERING | 1985年 / 71卷 / 1-2期

关键词：

D O I：

10.1016/0025-5416(85)90239-3

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：295 / 302

页数：8

共 15 条

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ELLEMAN, TS ;

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[4]

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[5]

Coppola JA, 1982, US Patents, Patent No. 4312954

[6] THERMODYNAMICS STUDIES OF HIGH TEMPERATURE EQUILIBRIA .3. SOLGAS, A COMPUTER PROGRAM FOR CALCULATING COMPOSITION AND HEAT CONDITION OF AN EQUILIBRIUM MIXTURE [J].

ERIKSSON, G .

ACTA CHEMICA SCANDINAVICA, 1971, 25 (07) :2651-&

[7]

FISCHMAN GS, UNPUB J AM CERAM SOC

[8] THERMODYNAMIC CALCULATIONS FOR THE CHEMICAL VAPOR-DEPOSITION OF SILICON-CARBIDE [J].

KINGON, AI ;

LUTZ, LJ ;

LIAW, P ;

DAVIS, RF .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1983, 66 (08) :558-566

[9]

PROCHAZKA S, 1981, GE81CRD314 GEN EL RE

[10]

SHAFFER PTB, 1973, 3RD P INT C SIL CARB, P343

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