LASER PATTERNING OF Y-BA-CU-O THIN-FILM DEVICES AND CIRCUITS

被引:49
作者
SOBOLEWSKI, R
XIONG, W
KULA, W
GAVALER, JR
机构
[1] UNIV ROCHESTER,LASER ENERGET LAB,ROCHESTER,NY 14627
[2] WESTINGHOUSE SCI & TECHNOL CTR,PITTSBURGH,PA 15235
关键词
D O I
10.1063/1.111075
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report our studies on electrical properties of Y-Ba-Cu-O test devices and circuits fabricated using a laser-writing patterning technique. The patterning procedure is noninvasive, does not require a patterning mask, and does not contaminate nor damage the surface of patterned films. Our laser-written, oxygen-rich lines (typically 4-100 mu m wide) possess excellent superconducting properties with zero resistivity at 89.5 K and critical current densities of above 2 MA/cm(2) at 77 K. On the other hand, oxygen-poor regions are semiconducting and exhibit thermally activated transport, well described by a three-dimensional, variable-length hopping process. Their resistance below 100 K is above 10 M Omega/square. A number of test structures patterned by laser writing, such as a microbridge, coplanar transmission line, open-ended microwave resonator, photoconductive switch, and Y-Ba-Cu-O field;effect transistor, have been presented.
引用
收藏
页码:643 / 645
页数:3
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