ELECTRON CURRENTS IN THE SPECIMEN CHAMBER OF A SCANNING MICROSCOPE

被引：10

作者：

OATLEY, CW

机构：

来源：

JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS | 1983年 / 16卷 / 04期

关键词：

D O I：

10.1088/0022-3735/16/4/015

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

引用

页码：308 / 312

页数：5

共 6 条

[1] BISHOP HE, 1966, 4TH ICXOM ORS, P153
[2] BACKSCATTERING OF 10-100 KEV ELECTRONS FROM THICK TARGETS
DARLINGTON, EH
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1975, 8 (01) : 85 - 93
[3] Moncrieff DA., 1978, SCANNING, V1, P195, DOI DOI 10.1002/SCA.4950010307
[4] DETECTORS FOR THE SCANNING ELECTRON-MICROSCOPE
OATLEY, CW
[J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1981, 14 (08): : 971 - 976
[5] MEASURING THE BACKSCATTERING COEFFICIENT AND SECONDARY-ELECTRON YIELD INSIDE A SCANNING ELECTRON-MICROSCOPE
REIMER, L
TOLLKAMP, C
[J]. SCANNING, 1980, 3 (01) : 35 - 39
[6] Reimer L., 1979, Scanning, V2, P238, DOI 10.1002/sca.4950020406