PERFORMANCE OF AN IMAGING PLATE AS AN X-RAY AREA DETECTOR USED FOR PLANE-WAVE X-RAY-DIFFRACTION TOPOGRAPHY

被引:5
作者
KUDO, Y
KOJIMA, S
LIU, KY
KAWADO, S
ISHIKAWA, T
HIRANO, K
机构
[1] UNIV TOKYO,FAC ENGN,BUNKYO KU,TOKYO 113,JAPAN
[2] NATL LAB HIGH ENERGY PHYS,PHOTON FACTORY,TSUKUBA,IBARAKI 305,JAPAN
关键词
D O I
10.1063/1.1146420
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
We report the linearity, spatial resolution, and granularity of x-ray intensity images recorded on imaging plates (IPs). The IF-processing system, designed for use with a transmission electron microscope (TEM), was used to evaluate the influence of these characteristics on profiles of local lattice distortion in silicon obtained by plane-wave x-ray diffraction topography (PWT). The signal intensity was linear with x-ray doses over four orders of magnitude of intensity, as has also been reported in the case of TEM. The modulation transfer function and root mean square of x-ray intensity images were measured to evaluate the spatial resolution and granularity. The results indicate that profiles of lattice distortion with a period of more than 0.5 mm can be reproduced by PWT in combination with the present IP-processing system. (C) 1995 American Institute of Physics.
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页码:4487 / 4491
页数:5
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