THE EFFECT OF MIXING HYDROGEN WITH SILANE ON THE ELECTRONIC AND OPTICAL-PROPERTIES OF HYDROGENATED AMORPHOUS-SILICON THIN-FILMS

被引：12

作者：

CHAUDHURI, P

RAY, S

BARUA, AK

机构：

来源：

THIN SOLID FILMS | 1984年 / 113卷 / 04期

关键词：

D O I：

10.1016/0040-6090(84)90468-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：261 / 270

页数：10

共 17 条

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[2]

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