PROPERTIES OF AMORPHOUS HYDROGENATED SILICON, WITH SPECIAL EMPHASIS ON PREPARATION BY SPUTTERING

被引：176

作者：

PAUL, W

ANDERSON, DA

机构：

来源：

SOLAR ENERGY MATERIALS | 1981年 / 5卷 / 03期

关键词：

D O I：

10.1016/0165-1633(81)90001-0

中图分类号：

TE [石油、天然气工业]; TK [能源与动力工程];

学科分类号：

0807 ; 0820 ;

摘要：

引用

页码：229 / 316

页数：88

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