DIRECT WRITING OF GOLD LINES BY LASER-INDUCED CHEMICAL VAPOR-DEPOSITION

被引：12

作者：

MESSELHAUSER, J

FLINT, EB

SUHR, H

机构：

[1] Institute of Organic Chemistry, University of Tübingen, Tübingen, W-7400

来源：

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING | 1992年 / 55卷 / 02期

关键词：

D O I：

10.1007/BF00334223

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Stripes of gold metal were deposited by focussing an Ar+ laser (514 nm) onto glass substrates in a heated vacuum cell containing the evaporator and the precursor. MeAuPMe3, Me3AuPR3 (R = Me,Et) were used as precursors. Using MeAuPMe3 or Me3AuPEt3, deposits of high quality were obtained above 40-degrees-C and 60-degrees-C evaporator temperature, respectively. With Me3AuPMe3 the same deposits of gold stripes were possible near room temperature. The stripes were characterized by scanning profilometry, electrical resistivity, SEM and SAM measurements. In general, the stripe resistivity was between 1.5 and 7 times of the bulk metal.

引用

页码：196 / 202

页数：7

共 33 条

[1]

BAUERLE D, 1984, SPRINGER SERIES CHEM, V39

[2]

BAUFAY L, 1988, MAT RES SOC S P, V101

[3] LASER CHEMICAL VAPOR-DEPOSITION OF GOLD - THE EFFECT OF ORGANOMETALLIC STRUCTURE [J].

BAUM, TH .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1987, 134 (10) :2616-2619

[4] LASER CHEMICAL VAPOR-DEPOSITION OF GOLD [J].

BAUM, TH ;

JONES, CR .

APPLIED PHYSICS LETTERS, 1985, 47 (05) :538-540

[5] LASER CHEMICAL VAPOR-DEPOSITION OF GOLD .2. [J].

BAUM, TH ;

JONES, CR .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1986, 4 (05) :1187-1191

[6]

BOYD IW, 1987, SPRINGER SER MAT SCI, V3

[7] GROWTH-RATES AND ELECTRICAL-CONDUCTIVITY OF MICROSCOPIC OHMIC CONTACTS FABRICATED BY LASER CHEMICAL VAPOR-DEPOSITION OF PLATINUM [J].

BRAICHOTTE, D ;

VANDENBERGH, H .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1987, 44 (04) :353-359

[8]

Braichotte D., 1984, SPRINGER SER CHEM PH, V39, P183

[9]

DAVIS LE, 1976, HDB AUGER ELECTRON S, pCH4

[10] LASER-INDUCED CVD OF RHODIUM [J].

FLINT, EB ;

MESSELHAUSER, J ;

SUHR, H .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1991, 53 (05) :430-436

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