FORMATION OF CH3 RADICALS IN THE DECOMPOSITION OF TRIMETHYL ALUMINUM ON HOT SOLID-SURFACES

被引：36

作者：

SQUIRE, DW

DULCEY, CS

LIN, MC

机构：

来源：

CHEMICAL PHYSICS LETTERS | 1985年 / 116卷 / 06期

关键词：

D O I：

10.1016/0009-2614(85)85208-8

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：525 / 528

页数：4

共 8 条

[1] METALORGANIC CHEMICAL VAPOR-DEPOSITION [J].

DAPKUS, PD .

ANNUAL REVIEW OF MATERIALS SCIENCE, 1982, 12 :243-269

[2] DETECTION OF GAS-PHASE METHYL RADICALS USING MULTI-PHOTON IONIZATION [J].

DIGIUSEPPE, TG ;

HUDGENS, JW ;

LIN, MC .

CHEMICAL PHYSICS LETTERS, 1981, 82 (02) :267-269

[3] MULTI-PHOTON IONIZATION OF CH3 RADICALS IN THE GAS-PHASE [J].

DIGIUSEPPE, TG ;

HUDGENS, JW ;

LIN, MC .

JOURNAL OF PHYSICAL CHEMISTRY, 1982, 86 (01) :36-41

[4]

HENDRICKSON CH, 1967, INORG CHEM, V6, P1461

[5] 2 PHOTON RESONANCE ENHANCED MULTIPHOTON IONIZATION SPECTROSCOPY AND STATE ASSIGNMENTS OF THE METHYL RADICAL [J].

HUDGENS, JW ;

DIGIUSEPPE, TG ;

LIN, MC .

JOURNAL OF CHEMICAL PHYSICS, 1983, 79 (02) :571-582

[6]

LIN MC, UNPUB MULTIPHOTON PR

[7] DEPOSITION OF GAAS EPITAXIAL LAYERS BY ORGANOMETALLIC CVD - TEMPERATURE AND ORIENTATION DEPENDENCE [J].

REEP, DH ;

GHANDHI, SK .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1983, 130 (03) :675-680

[8]

1968, USE ALUMINUM ALKYL S

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