MICRO-RAMAN STUDY OF BATIO3 THIN-FILMS PREPARED BY THE METALLOORGANIC DECOMPOSITION TECHNIQUE

A micro-Raman probe was used to characterize thin films of barium titanate synthesized by metallo-organic decomposition and rapid thermal annealing techniques. All films were found to be polycrystalline aggregates with perovskite as the primary phase. The optimum film processing procedure as evidenced by the micro-Raman probe was a combination of rapid thermal annealing at 950-degrees-C in an oxygen or argon atmosphere. Fourier transform infrared spectra indicated that samples annealed in a vacuum show higher carbon contamination than those receiving the same heat treatment in an oxygen or argon atmosphere.