GROWTH OF BATIO3-SRTIO3 THIN-FILMS BY RF MAGNETRON SPUTTERING

被引：80

作者：

FUJIMOTO, K

KOBAYASHI, Y

KUBOTA, K

机构：

来源：

THIN SOLID FILMS | 1989年 / 169卷 / 02期

关键词：

D O I：

10.1016/0040-6090(89)90708-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：249 / 256

页数：8

共 7 条

[1] FERROELECTRIC (PB,LA)(ZR,TI)O3 EPITAXIAL THIN-FILMS ON SAPPHIRE GROWN BY RF-PLANAR MAGNETRON SPUTTERING [J].

ADACHI, H ;

MITSUYU, T ;

YAMAZAKI, O ;

WASA, K .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (02) :736-741

[2] SPUTTER-DEPOSITION OF [111]-AXIS ORIENTED RHOMBOHEDRAL PZT FILMS AND THEIR DIELECTRIC, FERROELECTRIC AND PYROELECTRIC PROPERTIES [J].

ADACHI, M ;

MATSUZAKI, T ;

YAMADA, T ;

SHIOSAKI, T ;

KAWABATA, A .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1987, 26 (04) :550-553

[3]

DIDOMENICO M, 1968, PHYS REV, V174, P522, DOI 10.1103/PhysRev.174.522

[4]

ESAKI L, 1985, SYNTHETIC MODULATED, P3

[5] PREPARATION OF C-AXIS ORIENTED PBTIO3 THIN-FILMS AND THEIR CRYSTALLOGRAPHIC, DIELECTRIC, AND PYROELECTRIC PROPERTIES [J].

IIJIMA, K ;

TOMITA, Y ;

TAKAYAMA, R ;

UEDA, I .

JOURNAL OF APPLIED PHYSICS, 1986, 60 (01) :361-367

[6] EPITAXIAL-GROWTH OF LINBO3-LITAO3 THIN-FILMS ON AL2O3 [J].

KANATA, T ;

KOBAYASHI, Y ;

KUBOTA, K .

JOURNAL OF APPLIED PHYSICS, 1987, 62 (07) :2989-2993

[7] PREPARATION OF THIN BATIO3 FILMS BY DC DIODE SPUTTERING [J].

SHINTANI, Y ;

TADA, O .

JOURNAL OF APPLIED PHYSICS, 1970, 41 (06) :2376-&

← 1 →