DESIGN AND PERFORMANCE OF A REFLECTRON BASED TIME-OF-FLIGHT SECONDARY ION MASS-SPECTROMETER WITH ELECTRODYNAMIC PRIMARY ION MASS SEPARATION

被引:129
作者
NIEHUIS, E
HELLER, T
FELD, H
BENNINGHOVEN, A
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1987年 / 5卷 / 04期
关键词
D O I
10.1116/1.574781
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:1243 / 1246
页数:4
相关论文
共 5 条
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  • [2] NIEHUIS E, 1986, SPRINGER P PHYSICS, V9, P198
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    SAKURAI, T
    MATSUO, T
    MATSUDA, H
    [J]. INTERNATIONAL JOURNAL OF MASS SPECTROMETRY AND ION PROCESSES, 1985, 63 (2-3): : 273 - 287
  • [5] A TIME-OF-FLIGHT MASS-SPECTROMETER FOR STATIC SIMS APPLICATIONS
    STEFFENS, P
    NIEHUIS, E
    FRIESE, T
    GREIFENDORF, D
    BENNINGHOVEN, A
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1985, 3 (03): : 1322 - 1325