A TIME-OF-FLIGHT MASS-SPECTROMETER FOR STATIC SIMS APPLICATIONS

被引:90
作者
STEFFENS, P
NIEHUIS, E
FRIESE, T
GREIFENDORF, D
BENNINGHOVEN, A
机构
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1985年 / 3卷 / 03期
关键词
D O I
10.1116/1.573058
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:1322 / 1325
页数:4
相关论文
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