INITIAL-STAGE OF GROWTH OF THE GD A-SI-H

被引:5
作者
KOCKA, J
VANECEK, M
STUCHLIK, J
KUBELIK, I
SIPEK, E
机构
关键词
D O I
10.1016/0022-3093(83)90283-1
中图分类号
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:763 / 766
页数:4
相关论文
共 6 条
[1]   THE ROLE OF HYDROGEN IN HEAVILY DOPED AMORPHOUS-SILICON [J].
CARLSON, DE ;
SMITH, RW ;
MAGEE, CW ;
ZANZUCCHI, PJ .
PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1982, 45 (01) :51-68
[2]  
HIROSE M, 1982, US JAPAN PALO ALTO M
[3]   INITIAL GROWTH REGION OF THE GLOW-DISCHARGE ALPHA-SI-H [J].
KOCKA, J ;
STUCHLIK, J ;
VANECEK, M ;
KUBELIK, I ;
STIKA, O ;
SLOVECKIJ, DI ;
OVSYANNIKOV, AA .
SOLID STATE COMMUNICATIONS, 1983, 45 (08) :763-765
[4]   MEASUREMENTS OF DEPLETION LAYERS IN HYDROGENATED AMORPHOUS-SILICON [J].
STREET, RA .
PHYSICAL REVIEW B, 1983, 27 (08) :4924-4932
[5]   EFFECT OF ANNEALING ON THE OPTICAL-PROPERTIES OF PLASMA DEPOSITED AMORPHOUS HYDROGENATED SILICON [J].
TSAI, CC ;
FRITZSCHE, H .
SOLAR ENERGY MATERIALS, 1979, 1 (1-2) :29-42
[6]   PSEUDOGAP STATE DENSITY IN SPUTTERED A-SI-H FROM FIELD-EFFECT AND CAPACITANCE MEASUREMENTS [J].
WEISFIELD, R ;
VIKTOROVITCH, P ;
ANDERSON, DA ;
PAUL, W .
APPLIED PHYSICS LETTERS, 1981, 39 (03) :263-265