DEVELOPMENT OF HIGH-CURRENT METAL-ION BEAM SOURCE

被引:8
作者
INAMI, H
FUKUMARU, F
INOUCHI, Y
SATO, D
TANAKA, K
MATSUNAGA, K
机构
关键词
D O I
10.1016/0168-583X(89)90168-7
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
引用
收藏
页码:198 / 200
页数:3
相关论文
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