THE EFFECT OF ELECTRODE COMPOSITION ON RF MAGNETRON SPUTTERING DEPOSITION OF PB[(MG1/3NB2/3)0.7TI0.3]O3 FILMS

被引:46
作者
JIANG, MC
WU, TB
机构
[1] Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu
关键词
D O I
10.1557/JMR.1994.1879
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Ferroelectric Pb[(Mg1/3Nb2/3)0.7Ti0.3]O3 (abbreviated PMNT) thin films were prepared on silicon substrates by rf magnetron sputtering deposition with PbO-enriched PMNT targets. The effects of electrode composition and thin film growth conditions were investigated with grazing-incidence x-ray diffraction, secondary ion mass spectrometry, and scanning electron microscopy. The dielectric property of perovskite films was also measured. The usage of a Pt/Ti electrode was observed to enhance the formation of perovskite PMNT films; in addition, the TiO2 rutile phase was formed at the interface between the PMNT film and Pt electrode due to the oxidation of out-diffused Ti atoms from the inner Ti electrode. It was then noticed that if a target containing a larger excess of PbO was used, a higher consumption of TiO2 occurred and more perovskite phase would be formed in the deposited films. Consequently, perovskite PMNT films having a uniform microstructure and satisfactory dielectric property close to the bulk value were obtained by rf magnetron sputtering deposition on the Pt/Ti/SiO2/Si substrate at 640-degrees-C under appropriate working conditions.
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页码:1879 / 1886
页数:8
相关论文
共 20 条
[1]   PZT THIN-FILM PREPARATION ON PT-TI ELECTRODE BY RF-SPUTTERING [J].
ABE, K ;
TOMITA, H ;
TOYODA, H ;
IMAI, M ;
YOKOTE, Y .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (9B) :2152-2154
[2]  
BRUCHHAUS R, 1992, MATER RES SOC S P, V243, P123
[3]  
FRANCIS LF, 1990, MATER RES SOC SYMP P, V200, P173, DOI 10.1557/PROC-200-173
[4]   THIN-LAYER DIELECTRICS IN THE PB[(MG1/3NB2/3)1-XTIX]O3 SYSTEM [J].
FRANCIS, LF ;
PAYNE, DA .
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1991, 74 (12) :3000-3010
[5]   SOL-GEL PROCESSING AND PROPERTIES OF LEAD MAGNESIUM NIOBATE POWDERS AND THIN-LAYERS [J].
FRANCIS, LF ;
OH, YJ ;
PAYNE, DA .
JOURNAL OF MATERIALS SCIENCE, 1990, 25 (12) :5007-5013
[6]  
GUHA JP, 1987, J AM CERAM SOC, V70, pC39, DOI 10.1111/j.1151-2916.1987.tb04959.x
[7]   PREPARATION AND SWITCHING KINETICS OF PB(ZR, TI)O3 THIN-FILMS DEPOSITED BY REACTIVE SPUTTERING [J].
HASE, T ;
SHIOSAKI, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (9B) :2159-2162
[8]  
Huang T. C., 1990, ADV XRAY ANAL, V33, P91
[9]  
Kugiyama K., 1991, MATER RES SOC S P, V243, P179
[10]   PEROVSKITE FORMATION OF PB(MG1/3NB2/3)O3 AND PB(FE1/2NB1/2)O3 FILM BY SOL-GEL METHOD [J].
OKUWADA, K ;
NAKAMURA, S ;
IMAI, M ;
KAKUNO, K .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1990, 29 (06) :1153-1156