CHEMICAL VAPOR-DEPOSITION EXPERIMENTS USING NEW FLUORINATED ACETYLACETONATES OF CALCIUM, STRONTIUM, AND BARIUM

被引:117
作者
PURDY, AP
BERRY, AD
HOLM, RT
FATEMI, M
GASKILL, DK
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D O I
10.1021/ic00313a022
中图分类号
O61 [无机化学];
学科分类号
070301 ; 081704 ;
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页码:2799 / 2803
页数:5
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  • [21] ELECTRON-BEAM-INDUCED DECOMPOSITION OF ION BOMBARDED CALCIUM-FLUORIDE SURFACES
    STRECKER, CL
    MODDEMAN, WE
    GRANT, JT
    [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (11) : 6921 - 6927
  • [22] VANHOENE J, 1958, J PHYS CHEM-US, V62, P1098
  • [23] ORGANOMETALLIC CHEMICAL VAPOR-DEPOSITION OF HIGH-TC SUPERCONDUCTING FILMS USING A VOLATILE, FLUOROCARBON-BASED PRECURSOR
    ZHAO, J
    DAHMEN, KH
    MARCY, HO
    TONGE, LM
    MARKS, TJ
    WESSELS, BW
    KANNEWURF, CR
    [J]. APPLIED PHYSICS LETTERS, 1988, 53 (18) : 1750 - 1752