ALLOY ELECTRODEPOSITION FOR ELECTRONIC APPLICATIONS

被引:52
作者
CAVALLOTTI, PL
BOZZINI, B
NOBILI, L
ZANGARI, G
机构
[1] Dip. Chimica Fisica Applicata, Politecnico, I-20133 Milano, Piazza Leonardo da Vinci
关键词
ALLOY PLATING; MAGNETIC COATINGS; MAGNETIC RECORDING; MULTILAYERS; PERMALLOY;
D O I
10.1016/0013-4686(94)E0026-V
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Alloy thin films of interest for possible electronic applications were obtained by electrodeposition: Ni-Fe for magnetic heads, Co alloys for magnetic recording and Cu-Sb as a possible underlayer for electric contacts. Permalloy ECD Ni-Fe films were deposited from acid baths on Si wafers, patterned by photolithography; Co-Pt and Co-Pd films from baths of similar composition, obtaining hard Co-Pt and soft Co-Pd layers; Cu-Sb as oversaturated solid solutions or as multilayers depending on the deposition conditions. Electrokinetic behaviour and related structures are interpreted by means of the normality-inertia parameter P(ni).
引用
收藏
页码:1123 / 1131
页数:9
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