AN AUGER-ELECTRON SPECTROSCOPY STUDY OF LOW-TEMPERATURE SEGREGATION OF SILICON AT ALUMINUM SURFACE

被引:6
作者
ABERDAM, D
COROTTE, C
DUFAYARD, D
机构
关键词
D O I
10.1016/0039-6028(83)90487-9
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
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页码:114 / 136
页数:23
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