AN AUGER-ELECTRON SPECTROSCOPY STUDY OF LOW-TEMPERATURE SEGREGATION OF SILICON AT ALUMINUM SURFACE

被引：6

作者：

ABERDAM, D

COROTTE, C

DUFAYARD, D

机构：

来源：

SURFACE SCIENCE | 1983年 / 133卷 / 01期

关键词：

D O I：

10.1016/0039-6028(83)90487-9

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

引用

页码：114 / 136

页数：23

共 35 条

[21] PHOSPHORUS INTER-DIFFUSIVITY IN ALPHA-FE BINARY AND ALLOY SYSTEMS [J].

LUCKMAN, G ;

DIDIO, RA ;

GRAHAM, WR .

METALLURGICAL TRANSACTIONS A-PHYSICAL METALLURGY AND MATERIALS SCIENCE, 1981, 12 (02) :253-259

[22] A NEW SURFACE SEGREGATION TECHNIQUE FOR BULK DIFFUSIVITY MEASUREMENTS [J].

LUCKMAN, G ;

ADLER, LR ;

GRAHAM, WR .

SURFACE SCIENCE, 1982, 121 (01) :61-84

[23] AN ALGORITHM FOR LEAST-SQUARES ESTIMATION OF NONLINEAR PARAMETERS [J].

MARQUARDT, DW .

JOURNAL OF THE SOCIETY FOR INDUSTRIAL AND APPLIED MATHEMATICS, 1963, 11 (02) :431-441

[24]

MARTIN G, 1975, J PHYS PARIS C, V4, P165

[25] DIFFUSIVITY AND SOLUBILITY OF SI IN AL METALLIZATION OF INTEGRATED CIRCUITS [J].

MCCALDIN, JO ;

SANKUR, H .

APPLIED PHYSICS LETTERS, 1971, 19 (12) :524-&

[26]

Mclean D., 1957, GRAIN BOUNDARIES MET

[27]

PALMBERG PW, 1976, HDB AUGER ELECTRON S

[28] QUANTITATIVE DETERMINATION OF EVAPORATED SI FILMS BY NEUTRON ACTIVATION [J].

PEART, RF ;

JONA, F ;

WENDT, HR ;

SEIRMARCO, JA .

JOURNAL OF APPLIED PHYSICS, 1967, 38 (12) :4927-+

[29] AUGER-ELECTRON SPECTROSCOPY STUDY OF TIN DIFFUSION AND SURFACE SEGREGATION IN ALUMINUM, IN THE LIMIT OF VERY SMALL CONCENTRATION [J].

RAFFAT, E ;

ABERDAM, D .

ACTA METALLURGICA, 1979, 27 (08) :1381-1389

[30] SURFACE SEGREGATION AND ITS RELATION TO GRAIN-BOUNDARY SEGREGATION [J].

SEAH, MP ;

LEA, C .

PHILOSOPHICAL MAGAZINE, 1975, 31 (03) :627-645

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