AN INTEGRATED-OPTIC ADIABATIC TE TM MODE SPLITTER ON SILICON

A compact integrated optic fundamental TE/TM mode splitter, based on the mode-sorting characteristics of an asymmetrical adiabatic Y junction of optical waveguides exhibiting shape birefringence, operating at 1550 nm, has been designed using the discrete sine method (DSM) and the beam propagation method (BPM), realized, and tested. The structures were fabricated in a system of SiO2, SiO(x)N(y), and Si3N4 layers, using a low-temperature plasma-enhanced chemical-vapor deposition (PECVD) process, compatible with standard silicon IC processing.