EFFECT OF SPUTTERING PRESSURE ON THE STRUCTURE AND SOLID-STATE REACTION OF TITANIUM-NICKEL COMPOSITIONALLY MODULATED FILM

被引：51

作者：

CLEMENS, BM

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 09期

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D O I：

10.1063/1.338413

中图分类号：

O59 [应用物理学];

学科分类号：

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页码：4525 / 4529

页数：5

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