TEMPERATURE INFLUENCE ON CARBON ION-IMPLANTATION OF IRON

被引：6

作者：

RAUSCHENBACH, B ^{[1
]}

SOMMER, H ^{[1
]}

机构：

[1] KARL MARX UNIV,SEKT CHEM,DDR-7010 LEIPZIG,GER DEM REP

来源：

THIN SOLID FILMS | 1989年 / 170卷 / 01期

关键词：

D O I：

10.1016/0040-6090(89)90624-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：81 / 90

页数：10

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