CALCULATION OF PROJECTED RANGES - ANALYTICAL SOLUTIONS AND A SIMPLE GENERAL ALGORITHM

被引:225
作者
BIERSACK, JP
机构
来源
NUCLEAR INSTRUMENTS & METHODS | 1981年 / 182卷 / APR期
关键词
D O I
10.1016/0029-554X(81)90688-1
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
The concept of multiple scattering is reconsidered for obtaining the directional spreading of ion motion as a function of energy loss. From this the mean projection of each pathlength element of the ion trajectory is derived, which leads to the desired mean projected range. In special cases, the calculation can be carried out analytically, otherwise a simple general algorithm is derived which is suitable even for the smallest programmable calculators. The present approach lends itself easily to include electronic straggling or to treat composite target materials, or even to account for the so-called ″time integral″ .
引用
收藏
页码:199 / 206
页数:8
相关论文
共 16 条
  • [1] RANGE OF RECOIL ATOMS IN ISOTROPIC STOPPING MATERIALS
    BIERSACK, JP
    [J]. ZEITSCHRIFT FUR PHYSIK, 1968, 211 (05): : 495 - &
  • [2] BIERSACK JP, 1964, B37 HMI HAHN MEITN R
  • [3] BIERSACK JP, 1978, IONENIMPLANTATION HA
  • [4] BRICE DK, 1975, ION IMPLANTATION RAN
  • [5] GIBBONS JF, 1975, PROJECTED RANGE STAT
  • [6] JAHNEL F, UNPUBLISHED
  • [7] STATISTICAL RANGE DISTRIBUTION OF IONS IN SINGLE AND MULTIPLE ELEMENT SUBSTRATES
    JOHNSON, WS
    GIBBONS, JF
    [J]. APPLIED PHYSICS LETTERS, 1966, 9 (09) : 321 - &
  • [8] LINDHARD J, 1963, MAT FYS MEDD DAN VID, V33, P14
  • [9] LITTMARK U, UNPUBLISHED
  • [10] RANGE AND RANGE STRAGGLING OF ION-IMPLANTED BORON IN CD0.2HG0.8TE
    RYSSEL, H
    MULLER, K
    BIERSACK, J
    KRUGER, W
    LANG, G
    JAHNEL, F
    [J]. PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1980, 57 (02): : 619 - 624