共 5 条
[1]
GAS INJECTION SYSTEM IN THE TARA CENTRAL CELL
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1986, 4 (03)
:1079-1083
[2]
GOODRICH P, 1986, THESIS MIT
[5]
POST RS, 1986, MITPFCCP8617 INT REP