COMPOSITE - A COMPLETE MODELING PROGRAM OF SILICON TECHNOLOGY

被引：14

作者：

LORENZ, J

PELKA, J

RYSSEL, H

SACHS, A

SEIDL, A

SVOBODA, M

机构：

[1] FRAUNHOFER INST MIKROSTRUKTURTECH,BERLIN,FED REP GER

[2] FRIEDRICH ALEXANDER UNIV,LEHRSTUHL ELEKTR BAUELEMENTE,ERLANGEN,FED REP GER

[3] FRAUNHOFER INST FESTKORPERTECHNOL,MUNICH,FED REP GER

[4] UNIV MUNICH,INST NUMER MATH,D-8000 MUNICH 2,FED REP GER

来源：

IEEE TRANSACTIONS ON ELECTRON DEVICES | 1985年 / 32卷 / 10期

关键词：

D O I：

10.1109/T-ED.1985.22230

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：1977 / 1986

页数：10

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