LINEWIDTH MEASUREMENT WITH AN OPTICAL MICROSCOPE - EFFECT OF OPERATING-CONDITIONS ON IMAGE PROFILE

被引：57

作者：

NYYSSONEN, D ^{[1
]}

机构：

[1] NBS,WASHINGTON,DC 20234

来源：

APPLIED OPTICS | 1977年 / 16卷 / 08期

关键词：

D O I：

10.1364/AO.16.002223

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

引用

页码：2223 / 2230

页数：8

共 19 条

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[2]

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[4]

DE M, 1962, OPT ACTA, V9, P17

GRIMES, DN .

[6] OPTICAL PROPERTIES OF EVAPORATED FILMS OF CHROMIUM AND COPPER [J].

HENDERSON, G ;

WEAVER, C .

HOPKINS, HH .

[8]

KINZLY RE, 1972, J OPT SOC, V62, P3861

[9] HIGH-RESOLUTION STEPPING MOTOR DRIVE [J].

LAYER, HP .

[10]

LIN BJ, 1971, RC3659 IBM RES REP