FE IMPLANTATION IN IN0.53 GA0.47 AS/INP

被引：16

作者：

RAO, MV

KESHAVARZNIA, NR

SIMONS, DS

AMIRTHARAJ, PM

THOMPSON, PE

CHANG, TY

KUO, JM

机构：

[1] NBS,GAITHERSBURG,MD 20899

[2] USA,CTR NIGHT VIS & ELECTROOPT,FT BELVOIR,VA 22060

[3] AT&T BELL LABS,HOLMDEL,NJ 07733

来源：

JOURNAL OF APPLIED PHYSICS | 1989年 / 65卷 / 02期

关键词：

D O I：

10.1063/1.343129

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：481 / 485

页数：5

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