STRUCTURE AND GROWTH-KINETICS OF RHSI ON SINGLE-CRYSTAL, POLYCRYSTALLINE, AND AMORPHOUS-SILICON SUBSTRATES

被引：6

作者：

PSARAS, PA

THOMPSON, RD

HERD, SR

TU, KN

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1984年 / 55卷 / 10期

关键词：

D O I：

10.1063/1.332943

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：3536 / 3543

页数：8

共 21 条

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