VACUUM MICROELECTRONIC DEVICES

In this review/tutorial paper, we cover the history, physics, and current status of vacuum microelectronic devices. First we overview the performance requirements of vacuum microelectronic devices necessary for them to replace, or fill voids left by, solid-state devices. Next we discuss the physical characteristics of micro-field-emission sources important to device applications. These characteristics include fundamental features, such as current-voltage data and noise, in addition to engineering considerations, such as life expectancy and procedures for tube assembly. We conclude with a review of a wide variety of demonstrated and proposed devices based on vacuum microelectronic principles, including electron guns, microwave tubes, and flat-panel displays.