A PRECISION WIDE-RANGE OPTICAL GAP MEASUREMENT TECHNIQUE

被引：9

作者：

FLANDERS, DC

LYSZCZARZ, TM

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1983年 / 1卷 / 04期

关键词：

D O I：

10.1116/1.582760

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

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页码：1196 / 1199

页数：4

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