PLASMA IMMERSION ION-IMPLANTATION USING PLASMAS GENERATED BY RADIO-FREQUENCY TECHNIQUES

被引：197

作者：

TENDYS, J ^{[1
]}

DONNELLY, IJ ^{[1
]}

KENNY, MJ ^{[1
]}

POLLOCK, JTA ^{[1
]}

机构：

[1] CSIRO,DIV APPL PHYS,LUCAS HTS RES LABS,MENAI,NSW 2234,AUSTRALIA

来源：

APPLIED PHYSICS LETTERS | 1988年 / 53卷 / 22期

关键词：

D O I：

10.1063/1.100299

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：2143 / 2145

页数：3

共 5 条

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TRAN, NC .

JOURNAL OF APPLIED PHYSICS, 1987, 62 (11) :4591-4596

[4] STUDIES OF EQUILIBRIUM IN THE AAEC ROTAMAK [J].

DURANCE, G ;

HOGG, GR ;

TENDYS, J ;

WATTERSON, PA .

PLASMA PHYSICS AND CONTROLLED FUSION, 1987, 29 (02) :227-244

[5] USE OF ION-BEAM ANALYSIS IN METAL MODIFICATION BY MEANS OF ION-IMPLANTATION [J].

HUBLER, GK .

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, 1981, 191 (1-3) :101-113

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