TRANSPARENT B-C-N-H THIN-FILMS FORMED BY PLASMA CHEMICAL VAPOR-DEPOSITION

被引：27

作者：

MONTASSER, K ^{[1
]}

HATTORI, S ^{[1
]}

MORITA, S ^{[1
]}

机构：

[1] MEIJO UNIV,DEPT ELECT ENGN,TEMPAKU KU,NAGOYA,AICHI 468,JAPAN

来源：

THIN SOLID FILMS | 1984年 / 117卷 / 04期

关键词：

D O I：

10.1016/0040-6090(84)90361-4

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：311 / 317

页数：7

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