PRODUCTION AND PROPERTIES OF CONDUCTING CARBON-FILMS

被引：9

作者：

PIRKER, K ^{[1
]}

SCHALLAUER, R ^{[1
]}

FALLMANN, W ^{[1
]}

OLCAYTUG, F ^{[1
]}

URBAN, G ^{[1
]}

JACHIMOWICZ, A ^{[1
]}

KOHL, F ^{[1
]}

PROHASKA, O ^{[1
]}

机构：

[1] VIENNA TECH UNIV,LUDWIG BOLTZMANN INST BIOMED MIKROTECH,A-1040 VIENNA,AUSTRIA

来源：

THIN SOLID FILMS | 1986年 / 138卷 / 01期

关键词：

D O I：

10.1016/0040-6090(86)90222-1

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

页码：121 / 129

页数：9

共 7 条

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ANDERSON, DA .

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[2] RF-PLASMA DEPOSITED AMORPHOUS HYDROGENATED HARD CARBON THIN-FILMS - PREPARATION, PROPERTIES, AND APPLICATIONS [J].

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BRANDT, G ;

KOIDL, P .

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[3] PROPERTIES AND STRUCTURE OF AMORPHOUS HYDROGENATED CARBON-FILMS [J].

MCKENZIE, DR ;

MCPHEDRAN, RC ;

SAVVIDES, N ;

BOTTEN, LC .

PHILOSOPHICAL MAGAZINE B-PHYSICS OF CONDENSED MATTER STATISTICAL MECHANICS ELECTRONIC OPTICAL AND MAGNETIC PROPERTIES, 1983, 48 (04) :341-364

[4] ELECTRICAL AND OPTICAL-PROPERTIES OF HYDROGENATED AMORPHOUS-CARBON FILMS [J].

MEYERSON, B ;

SMITH, FW .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 1980, 35-6 (JAN-) :435-440

[5]

Mott N. F., 1979, ELECT PROCESSES NONC

[6] DC CONDUCTIVITY AND ELECTRON-SPIN-RESONANCE OF HYDROGENATED AMORPHOUS-CARBON FILMS [J].

ORZESZKO, S ;

BALA, W ;

FABISIAK, K ;

ROZPLOCH, F .

PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1984, 81 (02) :579-584

[7] MECHANICAL-PROPERTIES OF HARD CARBON-FILMS [J].

WEISSMANTEL, C ;

SCHURER, C ;

FROHLICH, F ;

GRAU, P ;

LEHMANN, H .

THIN SOLID FILMS, 1979, 61 (02) :L5-L7

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