EPITAXY OF FCC METALS ON DIELECTRIC SUBSTRATES

被引:57
作者
BIALAS, H
HENEKA, K
机构
[1] Abteilung Festkörperphysik, Universität Ulm, D-7900 Ulm, Oberer Eselsberg
关键词
D O I
10.1016/0042-207X(94)90346-8
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Epitaxial films of evaporated Cu, Ag, Al, Au and Ni have been grown on single crystalline dielectric substrates (c-cut Al2O3 and (100) MgO) under high vacuum conditions (p almost-equal-to 5 x 10(-6) mbar). The films were characterized by X-ray diffraction, RHEED, Nomarski microscope and Talystep profiler. Epitaxial growth is observed with substrate temperature T(s) > 200-degrees-C. In all cases the orientation film to substrate was for sapphire (111) metal \\ (00.1 sapphire) [211BAR] metal \\ [21.0] sapphire, and for MgO (100) metal \\ (100) MgO [001] metal \\ [001] MgO.
引用
收藏
页码:79 / 87
页数:9
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